図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP

Jaewon Lee (이재원), Kyung-Hyun Kim (김경현), Chin-Wook Chung (정진욱)2017年Physics of PlasmasIF 2.2 出版社

wiki

Inductively coupled plasma

この論文にはまだAI要約がありません。

関連論文

New and possible future trends in inductively coupled plasmas (ICPs) for semiconductor processing

1997Plasma Physics and Controlled Fusion

Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

2006Physics of Plasmas

Characterization of electron kinetics regime with electron energy probability functions in inductively coupled hydrogen plasmas

2016Physics of Plasmas

Effects of aspect ratio on electron loss mechanisms and plasma uniformity in cylindrical inductively coupled plasma

2020Physics of Plasmas

Electron energy distributions in a magnetized inductively coupled plasma

2014Physics of Plasmas

Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

2015Physics of Plasmas

Power dependence of electron density at various pressures in inductively coupled plasmas

2014Physics of Plasmas

On a dual inductively coupled plasma for direct and remote plasma in a reactor

2004Physics of Plasmas

Measurement of the electron energy distribution function in CO2inductively coupled plasma

2019Physics of Plasmas

Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

2005Plasma Physics and Controlled Fusion