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Spatial distribution and transport mechanism of electrons in large and powerful inductively coupled plasma sources with Faraday shield

Qiang Wang, Chao Chen, Yun-Qiu Cui, Chun-Jie Niu, Wei-Feng Liu, Guang-jiu Lei, Na Lu, Dong-Ping Liu2022年Physics of PlasmasIF 2.2 出版社

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Plasma source Inductively coupled plasma

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