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Properties of plasmas generated in microdischarges

E Muñoz-Serrano, G Hagelaar, Th Callegari, J P Boeuf, L C Pitchford2006年Plasma Physics and Controlled FusionIF 2.2出版社

We present in this paper a discussion of the properties of plasmas generated in microhollow cathode geometries and in microcathode sustained discharge geometries. The results presented here are derived from models. This work is part of a joint modelling/experimental programme whose objective is the evaluation of the potential of the high-pressure, non-thermal plasmas created in microdischarges (e.g. discharges in small, 100s of micrometre sized geometries) for the production of large quantities of radical species, and in particular oxygen singlet delta (metastable) molecules, O2(1Δ).

日本語訳

本論文では、マイクロホローカソード形状およびマイクロカソード維持放電形状において生成されるプラズマの特性について考察する。ここで提示する結果はモデルに基づくものである。本研究は、マイクロ放電(例えば、数百マイクロメートル規模の小型放電)において生成される高圧非熱平衡プラズマが、多量のラジカル種、特に酸素一重項デルタ分子O2(1Δ)の生成に有する可能性を評価することを目的とした、モデリングと実験の共同プログラムの一部である。

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