A series of different discharge configurations suitable for surface treatment at atmospheric pressure is discussed, including a non-thermal modular radio frequency (13.56, 27.12 or 40.78 MHz) jet plasma.The capacitively coupled configuration allows the operation with both rare gases (e.g. Ar) and reactive gases (N2, air, reactive admixtures of silicon-containing compounds). Several capillaries are arranged in an array to allow plasma assisted treatment of surfaces including non-flat geometries. Optical emission spectroscopy, mass spectrometry and measurements of the axial and radial temperature profiles are used to characterize the discharge.The surface energy of different polymer materials is significantly enhanced after plasma treatment. Many applications are possible, such as plasma activation of surfaces for adhesion control, surface cleaning, plasma enhanced CVD, plasma cleaning, plasma activation and biomedical applications.