図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Matching parameter estimation for high power Inductively coupled plasma sources using Machine learning techniques

Himanshu Tyagi, M.V. Joshi, Mainak Bandyopadhyay, M.J. Singh, Arun Chakraborty2024年11月Fusion Engineering and DesignIF 1.7 出版社

wiki

Plasma source Inductively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Plasma parameters analysis of various mixed gas inductively coupled plasmas

2002Physics of Plasmas

A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

2013Physics of Plasmas

Modelling of microwave plasma sources: potential and applications

1999Plasma Physics and Controlled Fusion

Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber

2019Physics of Plasmas

Interpretation of machine-learning-based disruption models for plasma control

2017Plasma Physics and Controlled Fusion

Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma

2015Physics of Plasmas

Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation—An alternate approach

2014Review of Scientific Instruments

Low-frequency, high-density, inductively coupled plasma sources: Operation and applications

2001Physics of Plasmas

Feasible power for DLC deposition on alumina by RF-biased inductively coupled plasma: Effect of atmospheric parameters

2023Physics of Plasmas

On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

2014Physics of Plasmas