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Measurement of mean electron energies in a pulsed ECR plasma using a diamagnetic coil

G Himmel, M Holtkamp, H Schluter1992年Plasma Physics and Controlled FusionIF 2.2出版社

The transient behaviour of the diamagnetic signals in the afterglow of a pulsed ECR discharge (in H2) excited by 2.45 GHz microwaves permits the measurement of the initial electron temperature (perpendicular to the static magnetic field direction, averaged in the radial direction) as well as the temporal decay of temperature after the end of the excitation pulse. In contrast to the use of a Langmuir double probe, which represents an alternative method in electrodeless discharges within nonconducting vessels. the interpretation of diamagnetic coil measurements is not hampered by deviations of the electron energy distribution function from equilibrium. As the Maxwellian case is approached both methods give consistent results. In the low pressure regime (up to 20 Pa) the influence of electron collisions on the plasma diamagnetism proves to be negligible. Using a diamagnetic coil one finds that electron energy densities down to 0.5*1018 eV m-3 are still detectable.

日本語訳

パルスECR放電(H₂中)の残光における反磁性信号の過渡挙動は、2.45 GHzマイクロ波によって励起された場合、初期電子温度(静磁場方向に垂直、半径方向に平均化)の測定と、励起パルス終了後の温度の時間減衰の測定を可能にする。非導電性容器内での無電極放電における代替手法であるラングミュア二重プローブの使用とは対照的に、反磁性コイル測定の解釈は、電子エネルギー分布関数の平衡からのずれによって影響を受けない。マクスウェル分布に近づくにつれ、両手法は一致した結果を与える。低圧力領域(20 Paまで)では、電子衝突がプラズマ反磁性に及ぼす影響は無視できることが証明されている。反磁性コイルを用いると、0.5×10¹⁸ eV m⁻³までの電子エネルギー密度が依然として検出可能である。

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