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Microscopic modification of wall surface by glow discharge cleaning and its impact on vacuum properties of LHD

M. Tokitani, M. Miyamoto, K. Tokunaga, T. Fujiwara, N. Yoshida, A. Komori, S. Masuzaki, N. Ashikawa, S. Inagaki, T. Kobuchi2005年被引用 24Nuclear FusionIF 3出版社

Glow discharge cleaning (GDC) is a widely used technique for wall conditioning in fusion experimental devices. Though the cleaning effects of GDC are essentially related to the microscopic modification of the wall surface, there are few reports about it. In the present study, specimens of wall materials were exposed to GDC plasma of helium, hydrogen and neon in the Large Helical Device (LHD) by using the retractable material probe transfer system and irradiation damage was examined by transmission electron microscopy to understand the underlying microscopic mechanism of GDC. In the case of Ne-GDC, the specimen surface was covered with a thick deposited layer of Fe and Cr but no radiation induced defects were observed. Due to the high sputtering efficiency and very shallow penetration, it is likely that neon atoms effectively sputter the surface contamination without leaving serious damage or remaining in the sub-surface region. After the Ne-GDC phase, retained Ne can be successfully removed by the following short hydrogen GDC. It was shown that a two-step GDC with Ne and H is very effective to clean the metallic surface of the LHD.

日本語訳

グロー放電洗浄(GDC)は、核融合実験装置における壁調整のために広く用いられている技術である。GDCの洗浄効果は本質的に壁表面の微視的変化に関連しているが、それに関する報告はほとんどない。本研究では、大型ヘリカル装置(LHD)において、引き込み式材料プローブ移送システムを用いて壁材料の試験片をヘリウム、水素、ネオンのGDCプラズマに曝露し、GDCの根底にある微視的メカニズムを理解するために、透過型電子顕微鏡により照射損傷を調べた。Ne-GDCの場合、試験片表面はFeとCrの厚い堆積層で覆われていたが、照射誘起欠陥は観察されなかった。高いスパッタリング効率と非常に浅い侵入深さのため、ネオン原子は、深刻な損傷を残したり表面下領域に残留したりすることなく、表面汚染を効果的にスパッタリングすると考えられる。Ne-GDC段階の後、残留したNeは、その後の短時間の水素GDCによって首尾よく除去できる。NeとHによる2段階GDCがLHDの金属表面の洗浄に非常に効果的であることが示された。

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