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Electron cyclotron resonance ion source plasma chamber studies using a network analyzer as a loaded cavity probe

V. Toivanen, O. Tarvainen, C. Lyneis, J. Kauppinen, J. Komppula, H. Koivisto2012年Review of Scientific InstrumentsIF 1.6 出版社

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Ion source Cyclotron resonance Electron cyclotron resonance

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