FusionPapers
図版検索AI要約wiki日本の研究装置ジャーナルChatGPTAbout
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

Laser produced plasma sources for nanolithography—Recent integrated simulation and benchmarking

A. Hassanein, T. Sizyuk2013年Physics of PlasmasIF 2.2出版社

wiki

Laser-produced plasmaPlasma source
この論文にはまだAI要約がありません。

関連論文

Numerical simulation of the effect of laser wavelength on nanosecond laser ablation and plasma characteristic

2022Physics of Plasmas

Plasma-nano-interface in perspective: from plasma-for-nano to nano-plasmas

2019Plasma Physics and Controlled Fusion

Experimental observations and modeling of nanoparticle formation in laser-produced expanding plasma

2008Physics of Plasmas

Stereolithography based method of creating custom gas density profile targets for high intensity laser-plasma experiments

2012Review of Scientific Instruments

On the role of target mass in extreme ultraviolet light generation from CO2-driven tin plasmas for nanolithography

2024Physics of Plasmas

Nanofoam in action: a versatile tool for laser-plasma interaction experiments

2026Plasma Physics and Controlled Fusion

Tabletop laser-driven gamma-ray source with nanostructured double-layer target

2018Plasma Physics and Controlled Fusion

Mass selection in laser-plasma ion accelerator on nanostructured surfaces

2017Physics of Plasmas

Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films

2009Plasma Physics and Controlled Fusion

Advanced laser-driven ion sources and their applications in materials and nuclear science

2020Plasma Physics and Controlled Fusion