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Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

Wen-Zhu Jia, Rui-Qiang Liu, Xi-Feng Wang, Xiang-Mei Liu, Yuan-Hong Song, You-Nian Wang2018年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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