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Experimental diagnosis of electron density and temperature in capacitively coupled argon plasmas: Triple-frequency discharges and two-dimensional spatial distributions

Jidun Wu, Hao Zheng, Yanfei Wang, Qilu Cao, Fengzhu Zhou, Jiaojiao Zhang, Xiaojiang Huang2021年Physics of PlasmasIF 2.2 出版社

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Argon Capacitively coupled plasma

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