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Dynamics of Ar metastable and resonance states in pulsed capacitively coupled plasmas

A. S. Kovalev, T. V. Rakhimova, A. T. Rakhimov, O. V. Proshina, A. N. Vasilieva, D. G. Voloshin2021年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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