図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source

J. Moreno, A. Khodaee, D. Okerstrom, M. P. Bradley, L. Couëdel2021年Physics of PlasmasIF 2.2 出版社

wiki

Ion source Ion implantation

この論文にはまだAI要約がありません。

関連論文

Charging effects on temporal and spatial evolution of the dusty plasma sheath in plasma source ion implantation

2001Physics of Plasmas

High voltage pulser with a fast fall-time for plasma immersion ion implantation

2011Review of Scientific Instruments

A new plasma potential measurement instrument for plasma ion sources

2004Review of Scientific Instruments

A metal plasma source ion implantation and deposition system

1999Review of Scientific Instruments

Phase-mixing of ion plasma modes in pair-ion plasmas

2015Physics of Plasmas

Pure high dose metal ion implantation using the plasma immersion technique

1999Review of Scientific Instruments

Harmonic plasma waves excitation and structure evolution of intense ion beams in background plasmas

2016Physics of Plasmas

Ion temperature and gas pressure effects on the magnetized sheath dynamics during plasma immersion ion implantation

2016Physics of Plasmas

New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses

2016Review of Scientific Instruments

Characteristics of plasma stream evolution in a pulsed plasma accelerator

2021Physics of Plasmas