New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses

Mario Ueda, Ataide Ribeiro da Silva, Elver J. D. M. Pillaca, Samantha F. M. Mariano, Rogério de Moraes Oliveira, José Osvaldo Rossi, Carlos Mauricio Lepienski, Luc Pichon2016年Review of Scientific InstrumentsIF 1.6 出版社