図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Special modulator for high frequency, low-voltage plasma immersion ion implantation

Xiubo Tian, Xiaofeng Wang, Baoyin Tang, Paul K. Chu, Ping K. Ko, Yiu-Chung Cheng1999年Review of Scientific InstrumentsIF 1.6 出版社

wiki

Ion implantation

この論文にはまだAI要約がありません。

関連論文

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010Review of Scientific Instruments

High voltage pulser with a fast fall-time for plasma immersion ion implantation

2011Review of Scientific Instruments

New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses

2016Review of Scientific Instruments

Pure high dose metal ion implantation using the plasma immersion technique

1999Review of Scientific Instruments

Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source

2021Physics of Plasmas

Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge

2011Review of Scientific Instruments

Ion temperature and gas pressure effects on the magnetized sheath dynamics during plasma immersion ion implantation

2016Physics of Plasmas

Simulation of a semitransparent conducting mesh electrode for plasma immersion ion implantation

2005Physics of Plasmas

A hybrid model for simulation of secondary electron emission in plasma immersion ion implantation under different pulse rise time

2015Physics of Plasmas

Low voltage drop plasma switch for inverter and modulator applications

1993Review of Scientific Instruments