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Discharge characteristics of steady-state high-density plasma source based on cascade arc discharge with hollow cathode

K. Yamasaki, O. Yanagi, Y. Sunada, K. Hatta, R. Shigesada, M. Sumino, T. Yamaguchi, Md. Anwarul Islam, N. Tamura, H. Okuno, S. Namba2022年Review of Scientific InstrumentsIF 1.6 出版社

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Steady state Plasma source Hollow cathode

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