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Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source

Xin Wang, Baozhong Mu, Li Jiang, Jingtao Zhu, Shengzhen Yi, Zhanshan Wang, Pengfei He2011年Review of Scientific InstrumentsIF 1.6 出版社

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Lithium Laser-produced plasma Plasma source

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