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Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation

Jia-Wei Huang, Fang-Jie Zhou, Xiang-Yun Lv, Yu-Ru Zhang, Fei Gao, You-Nian Wang2023年Physics of PlasmasIF 2.2 出版社

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Nitrogen Inductively coupled plasma

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